In July 1985, the Council of Deans agreed to establish Science and Technology Research Institute (previously known as Science and Technology Development Institute Establishment Project). The management committee consisted of three representatives from various science and technology fields including Faculty of Science, Faculty of Agriculture and Faculty of Engineering. The Board of Committee of the project included the former president of the university, Professor Arwut Srisugree, MD., three experts, one representative from each faculty, and the management committee participating as committees. The temporary office was located at the Fast Neutron Research Facility, Department of Physics, Faculty of Science. The budget was sponsored from the revenue budget of the university for the Office of the University. On 21 September 1987, the institute was officially established according to the Announcement of the Ministry of University Affairs regarding Chiang Mai University?s internal units dividing (5th Issue) year 1987, announced in the Royal Thai Government Gazette Volume 104, Issue 189, and which Assoc. Prof. Dr. Thiraphat Vilaithaong became the first Director. In October 1993, the office relocated to the fourth Research and Graduate Studies Building, which was a 3-storey building with an area of 904 square meters.
In 2008, the Announcement of Chiang Mai University regarding Establishment of Organisations of Chiang Mai University as announced in the Royal Thai Government Gazette Volume 125, Special Issue 112 Ngor, on 4 July 2008, changed the name from Institute for Science and Technology Research and Development to Science and Technology Research Institute, as part of the academic unit categorized under science and technology field, such as Faculty of Science, Faculty of Engineering, Faculty of Agriculture, Faculty of Agro-Industry, Faculty of Architecture, and College of Arts, Media and Technology.